Numazawa-kun (D2) There paper summarizes the is a master's thesis of its own "Research on placement accuracy evaluation of MEMS X-ray optical system" was published in the magazine JJAP。
In this paper in the fabrication process of the MEMS X-ray optical system、We focus on high-temperature plastic deformation process which is considered the main elements of the placement accuracy deterioration of the optical system。Together isolate the contribution to the arrangement accuracy of the process、And established a method for evaluating newly using the non-contact surface shape measuring device。This technique than the conventional method using the X-ray beamline、To allow the overwhelmingly simple evaluation、It is what can be expected to accelerate in the future of the development cycle at the same time。
※ arrangement accuracy: Angular resolution of X-ray telescope (Good eye) One of the genesis。It leads to blurring of the converged image by deviation from placement total reflection mirror one by one design。(cf. Shape accuracy)
Title : Evaluation of alignment error of micropore X-ray optics caused by hot plastic deformation
Authors : Masaki Numazawa, Daiki Ishi, Yuichiro Ezoe, Kazuma Takeuchi, Masaru Terada, Maiko Fujitani, Kumi Ishikawa, Kazuo Nakajima, Kohei Morishita, Takaya Ohashi, Kazuhisa Mitsuda, Kasumi Nakamura and Yusuke Noda
Link: http://iopscience.iop.org/article/10.7567/JJAP.57.06HJ11/meta
