Capital large MEMS X-ray optical system team、 2015 年度に集束イオンビーム (FIB) It was subjected to X-ray reflection demonstrated the world's first X-ray reflection mirror using a。This is the use of the FIB technology、It is currently based 5 つのステップから成る MEMS X線光学系の製作プロセスを 1 It suggests that can be simplified to step。In the present study was carried out until the completion of the test type、With the development of FIB technology、Near future、There may be more simple and high-performance ultra-light telescope is completed。
Also、2016 The year has established a method for obtaining a high precision perpendicularity of fine holes formed by the silicon dry etching by X-ray irradiation。This result is very effective as a performance evaluation method of the MEMS X-ray optical system、It plays an important role in the later development。
Each、Numazawa-kun、Summary Takeuchi kun as paper、2016 年, 2017 年に Japanese Journal of Applied Physics (JJAP) It has been published in the magazine。
Title : First demonstration of X-ray mirrors using focused ion beam
Authors : Masaki Numazawa, Yuichiro Ezoe, Kumi Ishikawa, Tomohiro Ogawa, Mayu Sato, Kasumi Nakamura, Kazuma Takeuchi, Masaru Terada, Takaya Ohashi, Kazuhisa Mitsuda, Ron Kelley and Kaoru Murata
http://iopscience.iop.org/article/10.7567/JJAP.55.06GP11/meta
Title : X-ray evaluation of high-verticality sidewalls fabricated by deep reactive ion etching
Authors : Kazuma Takeuchi, Yuichiro Ezoe, Kumi Ishikawa, Kasumi Nakamura, Masaki Numazawa, Masaru Terada, Maiko Fujitani, Daiki Ishi, Yusuke Noda, Takaya Ohashi, Kohei Morishita, Kazuo Nakajima and Kazuhisa Mitsuda
http://iopscience.iop.org/article/10.7567/JJAP.56.06GN04/meta
