Fukushima Aoto-kun of our laboratory 2021/9/10-13 The 82nd held online in Japan Society of Applied Physics At the Autumn Academic LectureRadiology Branch Received the Student Outstanding Lecture Award。
The contents of the lecture are as follows。
title：Evaluation of X-ray reflectivity of Co-deposited Si optical system using atomic layer deposition method
In MEMS X-ray optics、X-ray reflectivity (sensitivity) For improvement、Atomic layer deposition method (Atomic Layer Deposition: ALD) Heavy metal film formation is indispensable。This research team has excellent characteristics in the soft X-ray band toward the geomagnetosphere X-ray imaging project GEO-X. (cobalt) New challenge to film formation、And (silicon) On the surface 50 Succeeded in attaching a Co film of nm。Furthermore, JAXA Japan Aerospace Exploration Agency 30 Irradiation of X-rays using the m beamline、Shows high reflectance、We have also demonstrated that it is a smooth film that meets the GEO-X requirements.。
Regarding our metal film formation process、2019Japan Society of Applied Physics Lecture Encouragement Award of the Year (Fukushima-kun, M1 at that time)、2020Student Presentation Award of the Society of Geomagnetism and Planetary Areas of the Year (Ishi-kun, then D2) It will be the award following、Attracting attention from all directions。
