Published in Applied Optics magazine paper on grinding and polishing process of Fukushima-kun of MEMS X-ray optical system

Fukushima Mr. (M2) There paper summarizes the grinding and polishing process is a new and improved method of MEMS X-ray optical system has been published in Applied Optics magazine。

This study which was established for the first time a method for performing the grinding and polishing to delicate optical system、We are able to significantly improve the reflectivity of the optical system by excluding the bad reflection surface shapes。With the introduction of this new process、Future it is possible to cut out selectively reflecting surfaces、It takes is expected to improve the angular resolution。

Title: Grinding and chemical mechanical polishing process for micropore x-ray optics fabricated with deep reactive ion etching
Authors: Aoto Fukushima, Maiko Fujitani, Kumi Ishikawa, Masaki Numazawa, Daiki Ishi, Ryota Otsubo, Hikaru Nagatoshi, Hikaru Suzuki, Tatsuya Yuasa, Takaya Ohashi, Kazuhisa Mitsuda, and Yuichiro Ezoe
Link: https://www.osapublishing.org/ao/abstract.cfm?uri=ao-58-19-5240&origin=search