ALD/ALE2022 (6/26-29) was held in Ghent, Belgium。Japan Society of Applied Physics (September 9-11)、Plasma diagnosis by high-resolution X-ray spectroscopic analysis of supernova remnant N132D。It was the first time in a long time that the conference was held locally, so I was able to listen directly to research presentations.、It was a valuable experience。
Pt-coated Si X-ray Optics with Plasma Atomic Layer Deposition for GEO-X Mission
・ Yukine Tsuji (M1) “Co-coated Si X-ray optics with atomic layer deposition”
HP of ALD/ALE2022
